JPS6228839U - - Google Patents
Info
- Publication number
- JPS6228839U JPS6228839U JP11865685U JP11865685U JPS6228839U JP S6228839 U JPS6228839 U JP S6228839U JP 11865685 U JP11865685 U JP 11865685U JP 11865685 U JP11865685 U JP 11865685U JP S6228839 U JPS6228839 U JP S6228839U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- disk
- electrode
- rotating shaft
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11865685U JPH0425223Y2 (en]) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11865685U JPH0425223Y2 (en]) | 1985-07-31 | 1985-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6228839U true JPS6228839U (en]) | 1987-02-21 |
| JPH0425223Y2 JPH0425223Y2 (en]) | 1992-06-16 |
Family
ID=31005316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11865685U Expired JPH0425223Y2 (en]) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425223Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230096983A (ko) | 2020-11-04 | 2023-06-30 | 에드워즈 가부시키가이샤 | 진공 펌프 |
-
1985
- 1985-07-31 JP JP11865685U patent/JPH0425223Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230096983A (ko) | 2020-11-04 | 2023-06-30 | 에드워즈 가부시키가이샤 | 진공 펌프 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0425223Y2 (en]) | 1992-06-16 |